Research Of Excimer Laser Micro-Drilling Technics

Excimer lasers are produced by means of activating the quasimolecule. Excimer lasers are in ultraviolet range with shot wavelength, and is suitable for the high-accuracy micro-fabrication. And lasers of this range possess of high photon energy, the primary mechanism of etching polymer is bones dissociation. So excimer lasers are suitable for processing polymer. As a characteristic of excimer laser, the beam quality of most excimer lasers are poor, for example, the beams figure are rectangular and the energy distribution are uneven, both will effect the result of micro-fabrication.This work analyses the characteristic of excimer laser at first, then an accurate energy distribution of the laser beam of wavelength 248nm is given out. Depends on the theoretic analysis, a hollow waveguide is designed. As a result, the output energy distribution is improved, Satisfies the requirement of micro-machining.Depends on the analysis of characteristics of excimer laser and the projection objective, a high multiple lens is designed, which is optimized by the professional software ZEMAX, and then used in the accurate micro-machining. The system eliminate the lens aberration perfectly, and meet the requirement of machining at the precision of several microns.This work analyses the means of micro-fabrication and the facts that effecting the result of micro-fabrication nowadays, gives out a solution to reduce the gradient and improve the depth of the micro-hole. a fan-shaped aperture mask was designed, the aperture mask cooperate with a 3-axies worktable, makes up the micro-drilling system.