In this paper, the principle of the electrostatically driven MEMS optical switches is systematically analyzed. Especially, the 2DMEMS optical switches is detailedly studyed. According to the requirements of electro-mechanical and optical coupling characters, the technologies which include fabrication processing, mechanical structure design and optical coupling are developed. A novel bulk-silicon micromachining process has been achieved. Basing on the process, several 1×2 and 2×2 electrostatically driven MEMS optical switches have been designed, which can get a large displacement with low actuation voltage. The design optimization is done by means of FEM simulations using ANSYS software. A novel 1 × 2 electrostatically comb-driven MEMS optical switch and a 2 × 2 electrostatically comb-driven MEMS optical switch have been finished, then the measurement of electro-mechanical and optical coupling properties has been done.With low actuation voltage(22V), the 2×2 electrostatically driven MEMS optical switch has a large scale motion(>50μm) and a higher speed (> 1.5ms). |