Study On Design And Improvement Of Micro Dispensing Array Chip For Microarray Production

Microarray Analysis is a rapidly developing field in recent years. It is a multidisciplinary technology and derived from Micro Electro Mechanical System (MEMS), biochemistry, analytical chemistry and computing science. The micro dispensing array (MDA) technology is a very important and emerging project in moderate or low density microarray analysis. The arrayed nozzles are fabricated on the silicon wafer or some polymers by employing MEMS technology. The bio-sample spots on slides or membranes can be in process of biochemical reactions after directly dispensed from nozzles. Then, the reactive results are detected and analyzed. The MDA technology that involved the total processes of microarray production, reaction, detection, and analysis, is expectantly applied for life science, drug discovery and clinic medicine in the future.In this dissertation, microdispenser based on silicon has been optimized, we have also developed microdispenser actuated by PZT, which has been simulated by CFDRC, PZT film without crack has also been finished. The topics of this dissertation are presented below:1. A new project based on the most recent developments of microarray analysis, microarray fabrication, and MDA systems, was proposed.2. The MDA chip based on three layers and annular interspaces was successfully fabricated. PDMS was used to encapsulate the chip so that it could eliminate the possible contamination within the dispensing units.The feasibility of microdispenser based on PZT actuators was also validated.3. A novel micro dispensing chip with dual PZT actuators is discussed. The main actuator can provide energy for liquids ejection and the subsidiary one restrains liquid from reflowing. By means of CFD-simulation, design of dispensing chip,possesses of liquids filling and dispensing are simulated. Design of dispensing chip with dual PZT actuators was proved to be reasonable.4. ZrO₂ film without crack has been finished on SiO₂/Si while PZT film without crack has also been finished on Pt/Ti/SiO₂/Si, which offers a foundation for subsequent fabrication of the microactuator.It has been shown that the MDA system has some advantages such as portable, high speed, low sample consuming, as well as chip's design fexibility, and it can be applied for moderate or low density genetic detections and immunoassays.