Design Of Dynamic Performance Parameters Characterization System For Unpackaged Gas Sensors

The performance index of gas sensors should have been characterized before they are used. It is an absolutely necessary step during the manufacturing procedure of gas sensors. Unpackaged gas sensors are sense organs which are machining in given techniques. They are semi-manufactured goods of semiconductor gas sensors. Though they have not been packaged, they have had the main characteristics of gas sensors. It can raise the production efficiency of semiconductor gas sensors, accelerate their industrialization course, and raise the rate of finished products to characterize the performance index of unpackaged gas sensors. But people have not attached enough importance to characterization devices for unpackaged gas sensors; there are few perfect characterization systems of this kind in the market both here and abroad.Contacted with actual project, the design of dynamic performance parameters characterization system for unpackaged gas sensors is introduced in the paper which takes unpackaged gas sensors as the research object. The characterization system uses MSP430 MCU as the main device of A/D and control module; uses MFC to control the gas flux; uses ANTHONE intelligent instrument to control the temperature for the heating furnace; uses Modbus protocol as system communication protocol; uses MCGS configuration software as software development platform to make full use of software drivers and hardware resource, which realizes unpackaged gas sensors dynamic performance parameters characterizing, separation of data acquisition and data analysis, and virtualization of characterization system.The system has functions of operational environment simulation, signal modulating, data acquisition, data analysis and data management. It resolves practical problems in the process of unpackaged gas sensors characterizing, and provides a design method or system framework for constructing similar characterization system.