Study On Machining Microstructure By Using Femtosecond Laser

Femtosecond pulse laser has a lot of significant advantages, such as high peak value intensity ,precise ablation threshold ,limit thermal region ,high precision in micrometer level and so on. In this dissertation, theoretical and experimental studies on micromachining with 775nm, 150fs, 1kHz femtosecond pulse laser are present. It would be useful to the research on microstructure machining on surface and getting the appropriate parameter.Key points of my research are classified as following,1. Femtosecond pulse laser machining mechanisms , characteristics and advantages to the ablation and cutting are analyzed .2. Use the femtosecond laser system manufactured by Clark MXR Co. Ltd to perform a series of experiments on silicon surface to get the ablation process.3. Research on the relationship between the precision of size , roughness of the edge and the laser parameter and the material property by cutting the different materials .4. The morphological characteristics of machined structures are tested by AFM, SEM, and optic microscope to find the defect and optimize them.