Development Of Main Controller&Feedback Module Of Nano-manipulation System Based On AFM

In 1986,Atomic Force Microscope(AFM) was invented by G.Binnig, C.F.Quate and C.Gerber in order to observe the atomic surface images of insulated materials. At present, AFM is not only used to image sample surface with high solution, characterize many kinds of surface properties related to force interaction between the sample and tip, but also used as nano-manipulator to frbricate nanostructures.The thesis is supported by State Natural Science fundation (No.5030505 and 50675152). The AFM modeling scheme is presented by studying the imaging principles and atomic force interaction mechanism between the tip and sample. The Main & Feedback Controller of Nano-manipulation System based on AFM are designed by adopting modern advanced micro-processors, ARM (Advanced RISC Machine) and DSP (Digital Signal Processor). The embedded operation system uCLinx is applied in order to realize real-time and high efficiency of Nano-manipulation System by using multi-thread programming technology. The main contents of the thesis include:1. Summarized scanning probe microscope method development history and the current situation of AFM-based Nano-manipulation.2. The schemes of AFM system identification and mathematic modeling are presented based on the analysis of interaction between sample and tip and dynamic formula of micro-cantilever.3. A new design of mode-based high-speed AFM imaging feedback module is discussed by adopting modern robust H∞control theory.4. The main controller circuit is designed by adopting LPC2214 micro-processor embedded with ARM7TDMI-S core.5. The mode-based high-speed AFM imaging feedback controller is designed by using TMS320C6701 with high property-cost ratio and AD768 with ultra-convection-speed as the output of PZT tube driving signal.6. Adopt embedded operation system uCLinux and multi-threads programming technology to realize the real-time and high efficiency of AFM Nano-manipulation system; the peripheral driver development method under uCLinux is also discussed together with FLASH programming self-realization of DSP.7. Carry on some tests on A/D, D/A, I2C and USB circuits, and the influences of tip-sample interaction force, scanning speed, integral gain and proportion gain in contact mode, and drive amplitude, integral gain and proportion gain in tapping mode on sample imaging quality are studied experimentally.