The Research Of Wideband Piezoelectric Amplifier Based On Dynamic Application

With the development of modern science and technology, more and more researches involve in the manipulation of micro objects. The demands for the good dynamic characteristics of precise positioning systems are becoming higher in the areas of engine fuel injection, micro electro discharge machining, high speed scanning of scanning probe microscope, piezoelectric ink-jet printer and copycat and the driving of high performance disk etc. Piezoelectric actuator is a kind of ideal actuator for micro-positioning systems. It has some excellent characters such as small size package, high resolution of displacement and free of self-heat and noise. However, its load carrying ability falls obviously and its closed-loop frequency response bandwidth is relatively low in a high speed positioning condition.To solve the above problems, our research is mainly focused on the driving and control technique of piezoelectric actuator. By analyzing the reasons of the fault and optimizing the parameters of circuit in-depth, a new hybrid compensation technique based on feedback zero compensation and noise gain compensation is proposed and it increases the frequency bandwidth and dynamic characteristics of the piezoelectric amplifier effectively.To satisfy the demand of various dynamic waveforms as input signal in the dynamic application of piezoelectric amplifier, a signal generator system based on FPGA is designed. Melting the designed driver and controller, an integrated piezoelectric control system is built.Finally, a micro-positioning test system is designed based on the micro-position stage and a series of experiments are completed to verify the analyzing results of the thesis with the wideband amplifier. The experimental and theoretical analysis demonstrates that the work improves the performance of piezoelectric amplifier and will contribute to the development of higher dynamic characteristics in micromanipulation area.