The Position Technology Of Integrated-Chip Strip Based On Machine Vision

With the miniaturization, integration and high reliability of semiconductor device, the integrated chip's production and fabrication trends to be full automation with the character of high speed, high accuracy and intellectualization. The technology of machine vision has many advantages such as non-contact, high speed, high accuracy, real-time processing. Nowadays, this technology had been widely applied in the product process of integrated chip, and had gained the remarkable achievement.After research and experiment, this paper developed a position system of integrated-chip based on machine vision accordingly to the key question in this problem, which meets the technical and economical demand of manufacturer.After computing, the right components are choosen to establish this machine vision system, according to the system demand such as accuracy and speed. The software is developed based on Open eVision^TM image processing package. It has four function modules, including image acquisition, image processing, image match and parameter configuration, and finally achieve the goal which has been planned.Many experiment proved that this system has the advantage of high stability, high speed and high precision. This system avoid the problems of traditional method and meet the technical demand of manufacturer.It provides an efficient way to position integrated-chip and it can be also expanded to other applications.