Key Control Technique Of Wafer Handling Robot

Integrated Circuit(IC), the core of electrical information industry, is one of the new technologies which promotes the national economy and social informationization development. IC manufacture equipment holds important position in the semiconductor industry. As the necessary part of IC equipment, wafer transfer robot undertake the transit of wafer precisely, fast and steadily.In this article, based on the task requirement and the latest domestic and abroad technology, deep research is carried out in the following several aspects: kinematics and dynamics analysis, trajectory control, error analysis and calibration.Firstly, according to the kinematics and dynamics analysis, the robot models are derived including normal and inverse position solution, speed and acceleration model which provide theory foundation for the error analysis and calibration. The workspace of the robot and the resolution of the end-effector are also studied in this article. Besides, on the basis of Largrange equations the dynamics model is built to analyze the speed and torque of each joint and carry out the stimulation, which provide theory foundation for the hardware selection.Secondly, the control system of the wafer transfer robot is completed. Combined with the hardware structure and the actual teaching work pattern, the automatically path produce algorithm is completed and the simulation is carried on. A fast and steady trajectory control algorithm based on the time optimal is presented. The related stimulation is carried on and the program is finished.Thirdly, the major effect factors of the positioning precision are analyzed and the error model is built. According to the error model, the error sensitivity of each factor is obtained and a positioning precision compensate method is presented. Also, on the basis of the error model and the characteristics of the robot, the calibration and geometrical parameter identification method is provided.Lastly, experimental system is built for the robot. Calibration experiment and geometrical parameter identification experiment are performed to compensate the error of the end-effector. Besides the performance tests are carried out.