The Design And Implementation Of Semiconductor Manufacturing Equipment Throughput Management System

With the large-diameter size of silicon wafer, increasingly automatic and expensive equipment, equipment depreciation and maintenance accounted for the largest share of total costs of silicon manufacturing. So the fact whether equipment efficiency and equipment capacity can make the maximum utilization is one of the most important factors of manufacturing cost. Currently, CIM (Computer Integrated Manufacturing) system in many semiconductor manufacturing companies can not provide equipment capacity and throughput data, making it impossible to detect and solve problems in time and make corresponding decisions.In this paper, EAP (Equipment Automation Program), most closely linked with semiconductor manufacturing equipment in CIM system, was used to collect equipment process data required for capacity and throughput calculation with application of SECS(SEMI Equipment Communication Standard) communication protocol in event-driven way. And it was regarded as the interface between CIM system and WPH(Wafers Per Hour) management system. The equipment process data was recorded in daily log file with pre-defined format. With advantages of PERL language in database connection and operation, the text reading and parsing, dynamic invocation of external modules and the power of multi-platform support, PERL was used to retrieve EAP log files automatically from distributed computers in FAB by reading configuration in database, and parse log file for analysis and processing to obtain and store the required data into the database. And then a certain type of equipment was selected for study equipment operating mode, and abstract mathematical modeling for calculating capacity and throughput. Stored procedure of PL/SQL language in database server-side was used to implement mathematical modeling of this system in order to calculate WPH.The contents of this paper are organized as follows: Firstly, we summarize the technologies which will be used in CIM and equipment throughput management. Secondly, by analyzing the traits of equipment throughput management as well as the challenges encountered, we summarize the function architecture of the equipment throughput management system. And then we come up with required technologies and communication protocols for system. Finally, we introduce our equipment throughput management architecture and implementation solution.