Fabrication Of Photonic Crystals With Periodic Defects By Using Holographic Lithography Based On Phase Manipulating Method

In the last20years, photonic crystals (PCs) have been applied on a wide field, suchas Low-threshold lasers, Low-loss wave guides, on-chip optical circuitry and fiber optics.The applications of PCs require solving three major fabrication problems. First, how tofabricate a material with photonic band gap (PBG); second, how to precisely introducefunctional defects in PBG material; Furthermore, while there are coupling of two defects,how to control the relative positions of these two defects.Holographic lithography (HL) is based on the multi-beam interference. Using thistechnique a variety of functional micro-structures had been fabricated. Due to the simpleprocess, controlled lattice and unit atoms, and the compatibility with conventionalphotolithography, HL has obtained vast attention. Fabricated structure includesone-dimension Bragg grating, two-dimension and three-dimension photonic crystals andeven some quasi-crystals structures. But, since the applications of PCs usually requireaccurate introduction of defects, developing an effectively and accurately method toincorporate functional defects directly into PCs is necessary.The following are the main contents of this thesis.1. In theory, we study the relations between phase manipulation and shape ofmulti-beam interference pattern. A method to accurately translate interference pattern byphase manipulation was proposed.2. In computer simulations, we demonstrate that by manipulating beams phase, a1D,a2D interference pattern with compound structures can be reformed in their shapes ortranslated along desired displacements. Even more, we study on a2D quasi-crystalstructure interference pattern and achieve a series of displacements.3. In experiments, by using a liquid crystals spatial light modulator (LC-SLM) toregulate the phase of beams, real-time dynamic translations of the interference patternswere achieved. 4. By using a multi-beam phase-controlled holographic lithography and a diffractingoptical element, large area one dimensional (1D) and two dimensional (2D) PCs withperiodic waveguide were fabricated in SU-8. The uniform area is up to4mm2, and tens ofwaveguide have been introduced in the one dimension and two dimension PC structure.