Study Of The Effects Of A Transverse Magnetic Field On Radio Frequency Argon Discharges By Two-dimensional Particle-in-cell-Monte-Carlo Collision Simulation

The influence of an applied magnetic field on plasma-related devices has a wide range of applications. Its effects on a plasma have been studied for years; however, there are still many issues that are not understood well. Numerical simulations has have become a mature method independent of experiments after decades of development. Among them, the fluid simulation method and PIC/MCC (Particle-in-cell/Monte Carlo Collision) simulation method are two main means. The PIC/MCC model based on kinetic theory can give a more comprehensive analysis for the local, non equilibrium problems compared to the fluid model. However, the numerical results of two or even three dimensional PIC/MCC simulation are barely reported, which is restricted by the cost of computing resources. As many physical processes contained in the multi-dimensional models, the study of high dimensional numerical simulation is important, not only for researches, but also the design and optimization of related industrial equipment.In the first chapter, we will briefly give a depiction of plasma and some important parameters. The methods used in two-dimensional electrostatic PIC/MCC model will be deeply discussed in the second chapter. In the third chapter, we present the simulation results of argon discharge in a very simplified geometry. The present study mainly focuses on the influence of the electrons from an unmagnetized to a highly magnetized state on the particle behavior. At the same time, the ExB drift is presented and analyzed theoretically. First and foremost, we aim to give a better understanding of the role of an applied magnetic field in capacitive discharges.Radio frequency capacitive coupling discharge in low pressure, the typical distribution of electron energy presents a dual temperature. In this work, the evolution of electron energy and density was simulated. It was found that the applied transverse magnetic field has a large influence on the behavior of the plasma. First, the cyclotron motion of the electrons induced by the additional magnetic field can enhance the interaction between the electrons and the sheath, and as a result, the high-energy tail of the EEDF is enhanced. Next, as the magnetic field increases, the enhanced ohmic heating induced by the applied magnetic field contributes to the bulk plasma. Further, the applied magnetic field can increase the plasma density but gives rise to a non-uniformity of the plasma, which is determined by the E×B drift. In addition, we also found that a transverse magnetic field which has a gradient along the electrode leads to an improvement in the uniformity of the plasma. Meanwhile, for the production of negative hydrogen plasma source also has a potential value of application.