Study On The Experiment And Characteristics Of Helicon Plasma Source

Helicon plasma source is excited by helicon wave. This plasma has the highestdensity in low temperature plasma up to now. In helicon discharge the helicon wave,with whistler wave mode, propagates in the cylindrical plasma which is limited indiameter and magnetized in axial direction. This electronmagnetic wave is inducedthrough radio frequency heating and launched into the plasma through the isolatedwall. In plasma helicon wave has a shear wave structure and propagates along theplasma column. The energy of electronmagnetic wave is absorbed by electroncollision or collisionless damping. Since the1970s Boswell first generated plasma byhelicon wave, this plasma source has a good and broad application prospects inintegrated circuit technology, thin film deposition, etching and surface modificationand plasma propulsion, etc by means of high ionization efficiency, high electrondensity, low constraint magnetic field, the structure is relatively simple and lowdischarge pressure.This paper main work includes the construction of the steady-state helicon waveplasma and the diagnosis system and the diagnosis of the helicon plasma by usingthe Langmuir electrostatic probe, OES and ICCD etc. We also studied thecharacteristics and the transitions among the different discharge modes, researchedthe physical mechanism and its internal causes. In addition, we studied the effects ofdischarge parameters on plasma.