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Study On Boron Doping Process With Gas For CVD Diamond Coated Electrode

Posted on:2014-08-12Degree:MasterType:Thesis
Country:ChinaCandidate:C ZhouFull Text:PDF
GTID:2181330422480218Subject:Mechanical Manufacturing and Automation
Abstract/Summary:PDF Full Text Request
Conductive boron-doped diamond has a broad application prospect in the severe wastewater andthe highquality household water treatment due to its superior chemical and dimensional stability, lowbackground currents, and a very wide potential window of water stability. At present, China’sdiamond electrode research maily focused on the boron doping with solid or liquid, and theperformance of electrode is to be improved. The boron doping process with gas which is common andeffective in developed countries was analysed in this article, and the physical and electrochemicalproperties of the electrodes we prepared were researched to get the optimized process parametersThe main work and the results obtained in this paper are as follows:1. The boron-doped diamond electrode was successfully prepared by the way of HFCVD. Theinfluences of temperature, pressure, concentration of the carbon source, and the boron dopedconcentration on the electrode performance were studied.2. A new double-sided deposition system was designed, and the difference of stress between thesingle-sided and double-sided electrode was analysed by Ansys software. The influence of boronconcentration on the stress of film was also studied by the experiments. The influences ofpre-treatment and substrate material on the binding property for the film and substrate were studiedthrough the friction and wear experiments.3. The resistivity of the the electrodes were tested by the four probe way tester and the lowestresistivity could approach1×10-3·cm, a good doping efficiency was showed. The electrochemicalperformances were tested by the way of cyclic voltammetry. The potential window, backgroundcurrent, peak current, the reversibility and the stability of the electrode with different boronconcentration were studied. An obvious oxidation peak was found in the1.8V in the cyclicvoltammetry curve for phenol decomposition in the acid solution, and it showed that the electrode hadan efficient decomposition on the organic matter.
Keywords/Search Tags:BDD electrode, Process parameter, Residual stress, Film and substrate binding, Electrochemical properties
PDF Full Text Request
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