Synthesis And Properties Of Carbon Nanotubes Arrays Based On CVD Method

CNTs, due to their extraordinary electronic and mechanics properties, have awide range of applications in the manufacturing of electronics and compositematerials. Chemical Vapor Deposition（CVD）has many advantages such as craftsimple process, high purity production high etal, it also can make CNTs obtaindirectly on substrate. It is the most widely used method of making CNTs Synthesis.As a result, we choose the growth of CNT arrays on different substrates, theexperimental control, and the growth mechanism as the topic of this thesis.We investigated the fabrication of CNT arrays on SiO2substrates, discussed theinfluence of experimental parameters on the morphologies and structures of theproducts. The mechanical properties and electrical conductivity of CNT arrays weretested, and discussed some of the possible application fields of CNT arrays. Afterthat, we studied the growth of CNTs on Si substrates patterned with Au and Al.The results show that through optimization process, rapidly growth of CNTarrays can be realized in quartz substrate, CNT arrays can reach as long as1.3mm,and the fastest growth rate is about39μm/min. CNT arrays has a nearly completerecovery after compression. During repeated compressions at the set strain10%,the arrays can cover most of thickness and maintain a similar compressive stresswithout degradation of mechanical strength. When15%, linear change willoccur in conductivity of CNT arrays during the compression. The absorptioncapacities of CNT arrays to various solvents and oils, achieving6~9g.g-1dependenton the liquid density. On Au/Si substrates, according to the different reactionconditions to achieve the growth of CNT arrays patterning on Si substrate. On Al/Sisubstrates, we got CNT arrays patterning and its complementary structure bycontrolling the reaction kinetics.