Computer Technology Application In Micro Nano Processing In Femtosecond Laser

Femtosecond laser micro-nano-fabrication technology is a three dimensional fabrication technology,which is characterized by high precision, high efficiency, and high tolerance to the complexity of shapes ofobjects to create. When applied to fabrication, this technology requires a data model that is set up for theobject to create. The data model represents the shape of the object, and its complexity increases with that ofthe object. However, so far, there is not a generation program of data model for femtosecond lasermicro-nano-fabrication technology. We have achieved some innovative results, which offers a new strategyof data processing for the field of rapid prototyping. Combining computer simulation and experiment, wealso studied the optical performance of several micro-optical elements fabricated by femtosecond lasermicro-nanofabrication technology. Main contents of the thesis are shown as follows:(1) High precision optical elements require low surface roughness, which requires a high controlprecision of the fabrication system, that is, high precision spatial location and high precision of exposuretime control. To reduce the roughness of the target, we must improve the resolution of the processing,which requires less power and shorter exposure time.(2) In this thesis, diamond crystal structure and biomimetic compound eye structure were selected astwo representatives to introduce the data model generation algorithm methods based on analytical equations,and some key issues in the generation algorithm were studied. The data model of diamond crystal structureis composed of spheres and cylinders. The generation algorithm of sphere solved problems that generalalgorithm leads to stepped surface when generating a curved surface, and our algorithm can better maintainthe shape of a sphere and can avoid the problem of disuniformity of point cloud density caused by equi-arccutting method. Spherical micro-lens generated by the proposed method eliminates the steps on the top.Column generation algorithm solved problems of disuniformity of point cloud density after the generationof ellipses by a cylindrical coordinate system, and provided a method of cutting the data model to generatea rotating cylinder that is at an angle with the coordinate axises.