| Graphene is widely recognized as a new type nanomaterial in the21st century because of its specific characteristics, such as anomalous quantum effect at room temperature, high electron mobilities, high anti-thermal conductivities and excellent mechanics properties, which provide graphene with promising applications in various fields. Therefore the successful fabrication of high quality graphene is crucial for the research about its future application. Chemical Vapor Deposition (CVD) is a major processing method in graphene fabrication, and the thorough understanding of the processing is vital for the production of high quality graphene. In this thesis, the detailed processing of the fabrication of graphene via CVD was introduced, and the variation in the qualities of the graphene fabricated by Ambient Pressure CVD (APCVD) and Low Pressure CVD (LPCVD) under different ratios of H2/CH4was studied. Finally, high quality, large area single layer graphene was successfully fabricated based on the detailed studying and summary of the characterization of various graphene.Moreover, the processing of the graphene transferring based on the spin-coated PMMA films was introduced for obtaining high quality large area graphene, and the subsequent functionalization of the transferred graphene surface was performed for gas sensing. The results revealed that the0.5nm ZnO films deposited on the ozone treated graphene via Atomic Layer Deposition (ALD) will tremendously improve the graphene sensors sensitivity to formaldehyde. Its response to9ppm formaldehyde can reach striking level of above50%with much faster response time and low detection limit down to180ppb. It was clearly demonstrated that the functionalized graphene sensors will be much more sensitive to certain detecting gases. Hopefully, the thesis will provide useful information for future high quality single layer graphenes fabrication and graphenes application in gas sensing. |
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