The Thermal Conductivity Of Dielectric Thin Films Research

Heat conductivity defines the materials?conductive ability of heat. With the testing of thermal conductivity, one can understand the conductive properties of thin films Th~ classic measuring techniques are based on Fourier law ,but in the measurement, they are likely to be influenced by black-body radiation ,which leads to the errors in the measured result of heat conductivity. ;in addition , temperature gradient and heat flux are difficult to measure accurately. The 3 method is mainly used to measure the vertical thermal conductivity of all kind of thin films of different thickness, and can reduce the influence of black-body radiation on the measurement of thermal conductivity effectively ;in addition , in comparation to the complex mathematical formula and the difficult measuring instruments and installation of the other methods ,its are easy to carry out and get the correct thermal conductivity First, the paper will discuss the basic concepts of microscale heat conductance; second, introduce the basic principles and experiment installation of 3 method third, we make use of the method to measure the conductivity of different thickness of the different materials ;last ,according to the concepts of microscale ,we analyze the measured data to get the relationship between thermal conductivity and thickness of films. The paper is one part of the important item, Research on the Microscale Heat Properties of Micro-sensors , which is subsidized by the national nature fund.