Of Mems Energy Field Coupled Numerical Methods

This paper presents a new numerical algorithm Accelerated Relaxation Method for analysis of the problems for coupled energy- domains by using Aitken accelerated method, based on relaxation method. The method may use single energy-domain solver, so it is a general approach for multiple energy-domain simulation. The paper also gives calculation schemes of the problems of two and several coupled energy-domains. Especially, calculation scheme of electrostatic-mechanical coupling problem is given. Finally, several examples are calculated using relaxation method and Accelerated Relaxation Method and their numerical results are compared. The results are identical verifying the accuracy of Accelerated Relaxation Method. Observe that Accelerated Relaxation Method takes fewer iterations and is much fast compared to the relaxation algorithm.