X-ray Super-mirror Design, Fabrication And Testing,

In recent years, with the development of multilayer technology, the multilayer mirror has successfully been used in the fields of X-ray astronomy telescope, X-ray microscopy, X-ray project lithography, synchrotron, plasma diagnosis and so on. But these kinds of multilayer work at soft X-ray radiation. With the developing of science and technology, the corresponding optical components are required exigently, which work at hard X-ray radiation, for extend the applying range of X-ray optical component. For this reason, we have started the research in hard X-rayoptical component--hard X-ray supermirror firstly in China.The dissertation firstly discusses the design methods of hard1 X-ray supermirror on the basis of classical electrodynamics and optical characteristics of materials at hard X-ray radiation: selecting materials composing of X-ray multilayer and conforming the layer number of multilayer; calculating the optical character of X-ray multilayer and discussing on how the non-ideal surface reduce reflectance of the multilayers, because of scattering; discussing the optimization method to wide band (angle range and spectrum range) multilayer structure, using the method, which is based on the analytical methodbased on oversimplified analytical and semi-empirical formulas, and the numerical method based on extensive computer, we have designed successful C/W X-ray supermirror at Cu Ka radiation.From the techniques for fabricating optical multilayer mirrors,,the magnetron sputtering method is chosen to grow X-ray supermirror. The control precision of the film thickness is improved because of the use of error factor in the calibration of deposition rate. Though large numbers of tests, the better working parameters were made sure, and the C/W supermirrorhas been produced.This dissertation introduces x-ray diffractometer, and measured the C/W supermirror samples. The results show that the optical character of these samples is in good agreement with the calculated results. This research is supported by the National Natural Science Foundation of China.