Cvd Equation The Mixed Finite Element Method And Its Numerical Simulation

In this paper. the mixed finite element method is applied to analyze the complex flow phenomenon in a horizontal chemical vapor deposition (CVD) reactor. In particular, we show that the mixed finite element method can be used to efficiently approximate solutions to the impressible viscous flow coupled with the energy and the species equations. The existence and convergence of the mixed finite element solution of the discrete current velocity, temperature, viscous stress tensor the pressure of Newtonian fluid, the mass fraction are demonstrated. And fmally,an example of numerical simulation of fully discrete mixed finite element solution is also given. This paper consists of four parts as follows.Part I. To give the chemical vapor deposition equtions and discuss the existence and uniqueness of their generalized solutions.Part II. The semi-dicrete mixed finite element solutions of chemical vapor deposition equtions are discussed,we proved the existence, uniqueness of the solutions and their optimal order for their error estimates .Part III. The fully-dicrete mixed finite element solutions of chemical vapor deposition equtions and their error estimates are established.we proved the existence, uniqueness of the solutions and their error estimates are of optimal order .Part IIII. A numerical simulation of fully discrete mixed finite element solutions are agiven.