Integrated Development Of Two-dimensional Grating Infrared Spectral Imaging System

With the science and technology developed rapidly,the advanced spectrometer is required in many practical fields in order to meet the needs of real-time analysis and special usage.However,in the traditional design of the spectrometer,optical dispersion elements such as gratings or prisms have to be rotated continuously in very fine steps using the mechanical process in order to scan the wavelength and to achieve high spectral resolution measurements.Usually it takes several minutes to complete the wavelength scanning in the entire working spectral range.As the two-dimensional array detector developed,the spectrometer has been constructed with high spectral resolution and fast data acquisition.But its price is very expensive and the size is also large.What is more,our country has not obtained the self-owned intellectual property rights in this field completely.Based on the reasons mentioned above,we have worked on the research of designing a new type of infrared spectrometer with much potential application.In this work,we are fabricating a new type of infrared spectrometer,which could be used to acquire the spectral data quickly in optical communication field.The system was constructed by using a two-dimensional infrared InGaAs array detector and integrated grating consisting of ten subgratings,working in the infrared optical communication wavelength range(1450nm-1650nm).Without any mechanical moving elements,the system owns these features,such as great stability,fast data acquisition and excellent data repeatability so on.The results also show that the system has a spectral resolution and acquisition time of better than 0.1nm and less than 2ms,respectively,in the spectral range after system calibration.Thus this new type of spectrometer could be used to monitor the growth process of the multi-layer film with an integral or a fractional quarter-wavelength layer structure precisely for the advanced film deposition.