Design And Realization Of The Force Detection And Control System Of Multi-Probe Micro-Nanofabrication Apparatus

Owing to its excellent performance, nanotechnology has attracted a lot of interests in various areas including microelectronics, biomedical, national defense, which makes it become a potential future technology for the 21st century. As a carrier to bring nanotechnology into applications, a lot of nanofabrication methods have been realized with the rapid development of nanotechnology. As a low-cost fabrication method, friction-induced nanofabrication method presents great potentials for further nanofabrication.In present thesis, a second-generation multifunctional friction-induced micron fabrication apparatus with a higher degree of automation than the first-generation apparatus have been developed based on redesigning the force detecting and controlling system. Compared to the previous apparatus, the new device has much more advantages, including higher fabrication efficiency, better fabrication quality and more convenient operation. The main work and conclusions can be summarized as below.1. Development of a high-resolution load and friction signal acquisition system. Since the load has a significant impact on the friction-induced fabrication, as well as friction force can reflect the scanning state, the precise measurement of them will have a great impact on obtaining good fabrication results and future research. To convert the force signal to a digital signal, we’ve developed an approach through combining a laser displacement sensor for the normal stress measurement and strain gauge for tangential stress measurement.2. Design and manufacture of the bidirectional deformation cantilever. The structure and reliability of cantilever have a significant impact on the force test. We’ve designed the combined parallel double-reed cantilever, which can simultaneously support deformation in normal and tangential directions in order to discover the real-time contact information between the probe and substrate during the fabrication process. This structure can supply independently deformation without affecting each other to make sure that the cantilever displacement can react the real force value.3. Realization the automatic control of loading. Considering the lower fabrication efficiency and controllability in the first-generation apparatus, the second-generation apparatus utilizes the software-controlled mode of Z direction stepwise motion. As a result, all the operations can be auto realized by the software control panel.