Study On SOI-based SiO_x Column Photonic Crystal

The progress of human science and technology is largely based on the discovery and application of new materials. As one kind of new artificial material, photonic crystal optical devices have incomparable advantage over traditional optical device because of the photonic band gap (PBG) and the photonic localization. Silicon-on-insulator (SOI) material which is characteristic of low lost, high velocity, resistance to high temperatures and radiation becomes the main solution of breaking the confinement of bulk Si. Due to its refractive index difference of surface and buried oxide layer, SOI form a planar waveguide structure. SOI-based photonic crystal slab have received extensive interest. In this dissertation, we mainly the study propagation characteristic of the SOI-based SiOx column photonic crystal slabvia finite difference time domain method (FDTD). The important results are given as follows:(1) The basic knowledge of SOI and photonic crystal is introduced, including the characteristics, application fields of SOI material and the conception, structural characteristics, application fields, Commonly used preparation and Theoretical research methods of photonic crystal. The plane wave expansion method and finite difference time domain method are mainly described.(2) The waveguide theory, production processes and materials of photonic crystal slab is introduced. Each lithography etching process has its own advantages and limits. Lithography etching system can fabricate 2D photonic crystal slab structure through forming air holes or Si column on SOI material. We can also get 2D photonic crystal slab structure through forming SiOx medium column with different refractive index on SOI material by ion implantation system.(3) In this thesis, the SOI-based triangular lattice SiOx column and air hole photonic crystal slab is simulated and analyzed with The Finite Difference Time Domain Method. Based on the analysis of transmission curve about SOI-based triangular lattice ventage photonic crystal slab with different media column radius and different lattice parameter and SOI-based triangular lattice SiO2 column photonic crystal slab, we found the following rules. In the direction of ΓK, for different radius, photonic band gap width first increase and then decrease and its central wavelength is decrescent with the increase of the radius. The PBG’s of the SOI-based triangular lattice SiOx column with different refractive index photonic crystal slabs with same period are also investigated. we found that in the direction of ΓK, the PBG width increase and its central wavelength is decrescent with the increase of the refractive indices difference; In the direction of ΓK, the regular band gap is easy to be discovered.(4) One SOI-based triangular lattice SiO2 column W1 straight waveguide is designed and its transmission curve is analyzed. In the process of structure optimization, the defect mode bandwidth is narrowed and a structure that have good filtering function is found.