Localized Surface Plasmon Enhanced Emission And Properties Of MSM Device Based On ZnO Films

Over the past several years, the unique localized surface plasmon resonance (LSPR)characteristics of metallic nanoparticles have attracted great interest for its good prospects inbiomedicine, materials science, optoelectronic devices. Although the localized surface plasmonresonance enhancement researches obtained a series of progress, there are some challenges，suchas uncomplicated process, efficient, controlled morphology, and practical application. In thispaper, we studied the fabrication of Au nanoparicles (Au NPs) by magnetron sputtering, anddebated the effects of morphology and size evolution on localized surface plasmon resonance.And then demonstrated that the LSPR of Au NPs can be effectively used to enhance the blueemission of ZnO films and improve the performance of ZnO-based MSM UV photodetectors.The main contents and results are as follows:1. The Au NPs were fabricated by magnetron sputtering， and the effects of thermalannealing, the sputtering time, substrate materials. With the increase of thermal annealingtemperature, the morphology of Au NPs will change from anisotropy wormlike to the ball-likenanoparticles, dimensions uneven distribution, the larger spacing; the longer annealing time, thegreater average size. The different sputtering time of Au films, after the thermal annealingprocess, the longer sputtering time, the larger size, the greater spacing. The surface morphologyand size of Au NPs aslo have been influenced by different substrates. The LSPR characterizationofAu NPs could be tunned by change these conditions.2. Studied the fundamental properties of ZnO thin films prepared by magnetron sputtering,calculated the band gap of ZnO is3.27eV. The defect emission peaks had been found at400-500nm, further exploration of the effects of Au NPs for ZnO defect emission due to LSPR properties.The results showed that,60s sputtering time of Au NPs/ZnO composite films blue emissionintensity has six times more than pure ZnO films.3. Analysed the effects of Au NPs for the performance of ZnO-based MSM UVphotodetector because of LSPR properties. The results showed that, the performancesignificantly improved as the LSPR of Au NPs. The photocurrent increased larger by2.2times, the response time became shorter.