| ABSTRACT:The linear stage is the key component in precise or ultraprecise machining and measuring equipment in machinery manufacturing. The accuracy of the linear stage has direct influence on the machining precision so that the measurement is important. The measurement that focuses on single error term in the common methods is a time-consuming effort. Therefore, some simultaneous measuring methods for multi-degree-of-freedom error are studied. However, the crosstalk between each of the error components is a serious problem for this method. The errors crosstalk will have great influence on the measurement result and will not be ignored.In this paper, s system using a dual collimating lase to measure five-degree-of-freedom (5DOF) geometric motion errors (except the positioning error) of a linear stage, simultaneously, is described. The light source of this system is He-Ne laser, and the sensing elements are cube corner prisms and reflector, and detectors are PSD and QDs. We focus on analysis of the crosstalk between the five error components. The errors crosstalk, including the yaw crosstalk to the horizontal straightness, the pitch crosstalk to the vertical straightness, the roll crosstalk to the horizontal and vertical straightness, and the roll real value crosstalk to the roll measured value, can all be eliminated with the compensation. The precision of this system is developed.In this paper, the compensation model is established, and the compensation method is studied. A series of experiments is conducted. The results show that the stability and repeatability are very well, and the measuring results are agreed with the reference instrument, and the results verify the compensation effect. For a linear stage, compared with an electronic level and a laser interferometer, the residuals are less than2" when the roll errors are compensated, and the largest residuals for the compensated horizontal and vertical straightness are1.9μm and3.5μm, respectively. |
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