Flatness Of Workpiece Detection Technology

The ultraprecision plane is the base of precision machine tool and precision instrument. Plane precision is measured accurately is very important. Many probes laser interference error separation technique break through former measuring method' s limit. It can simultaneously on-line measure guide way error and vvorkpiece flatness error.The paper establishes the on-line measuring system through discussing and studying the domestic and overseas' s paper on flatness error measurement. The system use laser interference, capacitance untouching sensor, A/D sampling board and microcomputer which controls the system and processes datum. The software use Visual C++ 5.0 language and assembly language.The experiments have been done on granite worktable. The result shows that the system is stable and reliable. The measuring accuracy is about 0.5um/500mmx500mm. It meets the needs of the thesis.