Cathodic Vacuum Arc Plasma Chemical Vapor Deposition Class Of Diamond-like Carbon Films

Diamond-like Carbon(DLC) films were deposited by VAC and PCVD. Surface morphology, structure , performance of the DLC prepared with different methods and processes parameters. Surface of the films were observed by Scan Electron Microscope(SEM); The tructure of films were determined by X-ray Diffraction (XRD) and Later Raman Spectroscopy (Raman) ; contents of SP3 bonds and SP2 bonds were analyzed by X-ray photoelectron spectroscopy(XPS) ; Hardness of the films were measured by Depth-Sensing Indentation(DSI) .Results show , for DLC films deposited by VAC method, both energy and density of the incident particles have a threshold value. When arc current value is 45A, the optimum negative bias voltage is - 175V, SP3 bonds in the film is 49.86%; When arc current is 65A, the optimum negative bias voltage is - 100V, SP3 bonds in the film is 56.32%, the value of hardness of DLC is 17. 1卤7. 72Gpa ; When the negative bias voltage is - 100V,the optimum arc current is 65A. When DLC films prepared only through the adjustment of energy and density of the incident particles, there is an optimum value between them, contents of SP3 bonds in DLC films is the highest.For films deposited by PCVD method , Contents of SP3 bonds in films increase with the increase of energy and density of incident particles. When both accelerating voltage and ion current reach the specified value, the contents of SP3 prepared by PCVD method is the highest (31. 95%). Energy and density of incident particles doesn' t come to an threshold value just like films prepared by VAC method. Because of the limited power of Bulat-6ion source, higher contents of SP3 bonds of DLC films prepared by the ion source cannot be attained further more.Through observation of DLC surface morphology, there are some large particles existing in DLC films prepared by VAC method, which affects the films qualities, such as hardness of the films has not a good uniformity, but no big particles exist in the films prepared by PCVD method, average roughness (Ra) value of the films is 0. 34nm.Arc ignition property and arc stability of graphite target was analyzed, a kind of high purity and high strength graphite target was selected; Distribution of the plasma produced by Bulat-6 ion source was tubular structure, most plasma move in linear manner.The effect of different flux of N2 on DLC films prepared by VAC method was investigated. Research results show that when the flux of N2 is 24. Oml/min, hardness of the films decrease to 9. 57GPa compared with the 16. 67GPa of hardness value of DLC film without N2 addition. However, When the flux increase to 58. 2ml/rain, the hardness value is 18. 61Gpa.The effect of different flux of CH4 on Ti 鈥擳iC interlayer was investigate. Research results show that, the adhesion property of DLC film is better with the increase of flux of CH4.