Shape Memory Alloy Driven Micropump

More and more attention is being paid to NiTi shape memory alloys due to its excellent Shape Memory Effect (SME) and superelastic Effect (SE).The shape memory alloy thin films are becoming one of the most potential micro-actuating materials, due to their large recoverable strain, strong output force, low driving voltage, good biology compatibility, etc. However, there are some basic questions needed to be studied for device application.This text analyzed domestic and international developing situations of the same kind topic from the researching process of the shape memory alloy first, the problems to exist and to be resolved and the trend of development of SMA as the driving material were discussed, the working principle of shape memory alloy was elaborated in detail through the two aspects:the phase transition of the thermal dynamic characteristic of Martensite and the shape memory principle. The researching of making film by magentron sputtering, the influence of chemical composition and making technology to the film was analyzed and during the making technology, the influence of target, substrate and the vacuum of background to the film were researched, which established the foundation for making the better SMA for actuator and investigated a piece of technology of SMA film that can be produced for batch quantity and compatible with MEMS technology. By analyzing the DSC curve of SMA thin film, we can found the phase transition temperature is about 60℃.the AFM surface morphology of SMA thin film enunciated the alignment of the grain of the thin film surface was close, the size of the grain is about 200nm.With the analysis of the fluxion characteristic of constringency/proliferation tube,one-way flow principle of constringency/proliferation tube was gotten. The technology of micropump was imitated by IntelliSuite, which assured the making project. Compared the actuator of non-sketch turn with the sketch turn by ANSYS, we can got the project that can produce the actuator which has the bigger driving force.