Silicon Flexible Servo Accelerometer Design

A precision force banacing accelerometer for ineration navigation application is developed.The resolution,low-sensitivity threshold and high thermal stability are considered as design parameters.in order to guarantee a low-sensitivity threshold while maintaining robustness against shock,push-pull type long flexures are used in this paper.To improve thermal stability,this paper discusses the use of electromagnets as a magnetic fied source .The silicon pendulum assembly and modified inducance type pick-up is also developed to reduceassembling procedure.The measure range of accelerometer is 0-70g.At present, the silicon accelerometer base on mutual inductance variety have many thesis report in fremdnees, but no any thesis repot in home. This paper discuss the accelerometer base on mutual inductance variety for filling up the blank in silicon accelerometer of home, boosting up the onrush of weapon, improving the precision of navigation system is very importance, at one time, for taping the big measure rang accelerometer provide a new technology approach.