| Micromechanical gyroscopes with advantages in small size, light weight, low cost, high reliability have great prospects in various area compared with classical gyroscopes. Micromechanical gyroscopes manufactured in IC technology combined with micromachined process has small size ,driving and detecting are difficult. Nowadays the research of the electronic interface circuit is the key point in the field of Micromechanical gyroscopes. This paper aims to finish the electronic interface circuit of the tuning fork micromechanical gyroscope detected by capacitance to ensure the vibrating of the gyroscope and to detect and process the signals.1. The driving circuit of the tuning fork micromechanical gyroscope is designed. Two schemes are introduced, the open-looped driving circuit and the closed-looped one. The open-looped driving circuit is based on the idealization of the vibration. The square wave voltage and the direct current voltage are combined to drive the gyroscope. Influences of square wave voltage are analyzed though simulation .As for the real situation of the vibration, The closed-looped driving circuit is given. Based on the principle of phase-locked, the closed-looped driving circuit is designed using the special chip.2. The circuits of small capacitive sensors are introduced in detail.The "buffer" circuit and the "'charge sense" circuit are analyzed; Sources of error in the later are introduced in detail, at the same time the solving method and the principles are given.3. The sensing circuit tuning fork micromechanical gyroscope is designed. As for the detecting circuit of the capacitances, the "charge sense" circuit are improved, and the detecting bridge is designed. Trough the analysis of the output of the detecting circuit of the capacitances, the processing circuit is designed, and the angular rate is separated :Parameters computed of the gyroscope and the performance analyzed of the circuit show that the circuit can reach the base requirement. |
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