The Active Phase-shifting Interferometer Vibration And Electrical Integrated Control Technology

While being a well-established technique for precise and non-contact optical testing, phase-shifting interferometry (PSI) is sensitive to the external vibrations. In this paper, the development of vibration-resistant interferometer is reviewed at first. Then, several familiar methods immune to vibration are discussed on their advantages and disadvantages. Referred to the existed methods and based on abundant experiments, a novel vibration-resistant method is presented. The light heterodyne technique is used for vibration detecting and the piezoelectric transition (PZT) is used as the device for vibration compensation. The theory of this method, the design of electro-circuit for this method and the programming for DSP are described in detail. Lastly, a vibration-resistant phase-shifting interferometer is set up, and sufficient online experiments are carried out. The electronic system works well to drive the PZT to environmental compensate the vibration during the phase-shifting measurement in the presence of vibration whose product of amplitude and frequency is under 50 waves ?Hz The results agree well with that under the condition without environmental vibration.Digital wavefront interferometer is a type of intelligentized instrument partly integrated the techniques of optics, mechanics, electronics and computer science. The electronic component plays an important role in it. An electric integrated control of interferometer is studied in this paper. The microprocessor is used as the kernel of control circuit. The design and programming of electro-circuit for this control system are described. In the end, online experiments are carried out using a interferometer with this electronic integrated control system. The results show that this system works robustly...