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Spherical And Cylindrical Absolute Measurement Technology Research

Posted on:2005-11-27Degree:MasterType:Thesis
Country:ChinaCandidate:Z J YangFull Text:PDF
GTID:2192360152465666Subject:Instrumentation engineering
Abstract/Summary:PDF Full Text Request
On the base of reviewing optical interference test, researching work which performance absolute measure ment of spherical and cylindrical surface on sphere laser interferometer is introduced. First. the principle of absolute test. the key of technology, the result of experiment and the uncertainty analysis of test are introduced in the way by two-time or three-time test. Second, the cylindrical surface is also introduced by three-time test.Three-time test is based on spherical interferometer. By three-time tests, that is a routine testing, another testing the test surface is rotated through 180 . and the third testing the test surface is in cat's position, three interferograms will be get. We process three interferograms we have got. and separate the absolute error of the test surface. The two-time tests is a simple way of three-time tests. It is fit for the status that the test surface is symmetrical and the precision isn't high. It omits the process of the rotated test in three-time tests.The cylindrical absolute test of three-time tests will be used in the absolute test of cylindrical surface. This measurement system consist of the frame of Fizeal interferometer and a standard cylindrical lens. A cylindrical wave will be get in the measurement system. and a cylindrical mterferograms will be also produced by the tested cylindrical mirror. By three-time absolute interference measure, that is a routine testing. another testing the test surface is rotated through 130 . and the third testing the test surface is in cat's position, we process three inicrferograms we have got. eliminating the system error of the apparatus. The absolute wave-aberration of the test surface will be got.
Keywords/Search Tags:spherical surface, cylindrical surface, wave-aberration, interference, measurement, absolute, test
PDF Full Text Request
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