Characteristics Of Silicon Micro-accelerometer And Applied Research

The rapid development of integrated circuit and MEMS technology accelerates the research and application of the micro-Si inertial sensor. At present, the micro-Si inertial sensor is presenting the trend of commercialization and industrialization in every field. The micro-Si inertial sensor has many advantages in bulk , integration, cost, power consumption, reliability etc. But, the low precision of micro-Si inertial sensor manufactured in all countries at present confines the application range of micro-Si inertial sensor to a great extent. At the same time, many applications want to estimate velocity and displacement by the measurement of acceleration. So, this dissertation considers ADXL202 ,a kind of dual-axis accelerometer made of AD Corporation of USA, as the study object, and uses the special algorithm , for example Kalman Filtering, to filter the noise adulterating in acceleration signal measured by ADXL202 and estimate the velocity and displacement of mobile. Main research subjects are included as follow:1. Introducing the elements and common characteristic of ADXL202. Expatiating on the circuit design of application and the calibration of ADXL202. Introducing the experiment system of the subject. Analysing and studying the static and dynamic characteristic of ADXL202 deeply.2. Introducing a method of establishing the state-space model of micro-Si accelerometer. Basing on it, expatiating on the algorithms of standard Kalman Filtering and Sage&Husa Adaptive Kalman Filtering , and on their applications. These are the emphases of this dissertation.3. Dissertating the design and application of Butterworth digital filter. Integrating the acceleration signal filtered by Butterworth digital filter to obtain the estimations of velocity and displacement.