Binary Optics Research, Design And Production Process

By designed and fabricated some actually binary optics elements, the thesis studied and analyzed the process of Binary Optics elements' facture.As to the design, I studied the basic theory of binary optics elements according as Scalar Quantity Diffract Theory, introduced a optimize method to design binary optical elements based on the Genetic Algorithm and Hybrid Genetic Algorithms and used emulation programs designed some common binary optics elements.As to the fabricate, I introduced a novel manufacturing method for gray-scale masks based on spatial light modulator, studyed some difficult questions such as mask patterns' making and technics, fabricated some gray-scale masks of normal binary optical elements that I designed, studied the Photo-Etching and Etching, putted forward some observe and consider and in the end, fabricated the actually binary optics elements.