Mems Cad Device-level Macro Model Of Access To Technology

With great development in MEMS field, the MEMS devices are more and more complex. Computer aided design (CAD) tools are thus needed to support rapid modeling and simulation of the system-level behaviors of MEMS. In recent years, MEMS design technique has been well studied and developed under the guideline of structure design method. But the gap between system-level simulation and physical-level simulation still exist, for the device-level macromodeling technology has Iaggardly progressed. So it will be significant to improve the MEMS CAD technique for this thesis focus on the practical macromodeling technology and automated macromodeling software.Aiming at the requirements of fast system-level modeling and simulation and the characteristics of multiple energy domains interaction, this paper has been investigated the macromodeling methodology, also researched the Krylov subspace based project method and automated macromodeling software framework.Obtaining mucromodel with disposing the result files of physical-level simulation, and then packaging it to the subsystem behavioral model. It transformed physical model to system model. This kind of macromodel can be connected with Multi-Port-Element model, enriching the system modeling method, also recuperating the shortage of analytical model.Firstly, based on structure design method the gap between physical level and system level simulation has been analyzed. By obtaining device macromodel can recuperate this gap, also several methodologies of macrodcling have been investigated. In reference to control theory, some principle and characteristics of Krylov subspace projection based algorithm have been detail analyzed, which may be used in MEMS CAD tools as automated macrodeling process. Meanwhile, two typical MEMS devices including micro resonator and Z axis accelerometer have been macromodeled as black box model, which can be connected with Multi-Poil-EIement model. These two models both have been compared with finite element analysis and system level simulation using Multi-Porl-Element Network (MuPEN) model. The details about accuracy and efficiency have been validated, also the process and realization framework of the automated macrodeling software have been discussed. Finally, summarized this thesis, and several advice about improving model order reduction algorithm and optimizing the automated macrodcling software has been proposed.