Preparation Of Vanadium Oxide Thin Films

The pure VO₂ thin films which undergone three techniques and two annealing process were fabricated on glass substrates by the method of inorganic SOL-GEL from V₂O₄ and V₂O₅ powder, and the best preparing process was chose; the preparing process on Si substrates was also researched, and we got the better method to prepare the VO₂ pure films; we got the Mo-doped V_1-xMo_xO₂ films in different solution by the method of inorganic doping. The phase-component, micro-structure, optical absorption, R-T properties and thickness of the thin films were characterized by XRD, microscope, UV-VIS and R-T equipments.The investigation from XRD reveals that different oriented VO₂ thin films were prepared from different annealing process. The research of microstructure reveal that VO₂ thin films' structure was affected by V₂O₅ thin films', when we annealed from the V₂O₅ thin films which have the oriented configuration we got the oriented VO₂ thin films too, this phenomenon disappeared when we use non- oriented V₂O₅ thin films, and the VO₂ thin films were of the compact structures like acerous structures. According to UV-VIS absorption analysis, we discovered that the absorption of different annealed samples in ultraviolet and vision region are similar, their maximum absorption appeared 400nm wavelength. From R-T curves we find that when the temperature is 68℃, the resistance of VO₂ thin films which undergone 480°C/6h vacuum annealing abruptly decrease with 2 magnitude, and TCR(=-2.59%/K) was calculated; we made the doping experiment and got V_1-xMo_xO₂ doping films in different solution; we also researched the effect of annealing temperature, time and thickness on VO₂ thin films' properties, and find that when the thickness decrease from 72.75um to 16.59um, thinner films are better to make pure VO₂ thin films ; at the vacuum temperature of 450℃ and 480℃, when the time was prolonged from 2h to 6h, longer annealing time make for VO₂'s creating in the same annealing temperature, higher temperature make for main phase's crystal in the same annealing time; the process of higher temperature and longer annealing time are equivalent on effect of VO₂.In addition, this paper also introduced the preparation technology with SOL-GEL method as main, properties, application and the late development in worldwide of the V₂O₅ and VO₂ thin films.