Lithography Isolation Test Platform Motion Control System Design And Research

Ultra-precision motion stage is one of the key components of thestep-scanning photographic machine. With the continuous pursuing to highquality and high efficiency of the semiconductor lithography equipment inproduction, the motion stage is developing further towards high velocity andhigh acceleration. Thereby, how to reduce and even to remove the vibrantimpact caused by high velocity and high acceleration, and guarantee thelithography quality of the related production, is becoming a urgent problemto be solved in the process of developing semiconductor lithographyequipment.The research interrelated in this thesis comes from National Nuralscience fonds supporting Item "Damping and Isolating Vibration Technologyfor Precision Manchine". The aim of the thesis is to design a testing stagethat can simulate the dynamic and motional characteristics of photographicmachine, and thus provide a real model and hardware basis for the followingresearch in damping and isolating vibration.Firstly, on the basis of analyzing the photographic machine's workingmechanism, the thesis designs the stage's hardware frame. At the same time, according to the motion characteristics and idiographic control request of thestage, it establishes the whole designing scheme of stage's motion controlsystem: adopting the master-slave control structure which consists of PC andmultiple-axis motion controller.And based on this, calculates the parametersand chooses the tye for key components contraposing the control system'sapplication request.Next, the thesis expatiates the principles of PID control and compoundcontrol and the methods to design these controllers, and optimizes theparameters of the controllers in velocity loop and position by usingNelder-Mead simplex method. In order to validate rationality and feasibilityof the whole control scheme and the arithmetic, the thesis establishes thecontrol system's mathematical model and had a simulation using Simulinksoftware. The simulation not only gives a valuable forecast of the realsystem's performance, but also proves the feedforward-control's importancein promoting the system's following capability. The simulation also indicatesthat if we choose proper parameters for the controllers, the system will fulfill the scheduled request.Furthermore, the thesis gives more illustration and research details inhardware's installation and adjusting. The control system's performancegoes up to a higher level by the adjusting work.At last, the thesis proof-tests some important targets of the stage, andconfirms the best synchronous controlling method designed in formerchapters by online test.The test proves that the designed motion controlling system fulfill thescheduled targets, and can simulate the photographic machine's motion. Andit provides a dependable platform for next research in damping and isolatingvibration.