Probes For The Detection Of Microwave Ecr Plasma Research And Design

Microwave electron cyclotron resonance (ECR) plasma has attracted a lot of attention as they can generate uniform plasma on large area with high degree of ionization and high density at low-operating pressure. Further advantages of the ECR plasmas are low sputtering rates by the charged particles and electrode-less design. With these advantages, Microwave ECR plasma finds number of applications in the areas of etching technologies, thin film deposition and plasma source. The level of the applications is directly related to the important parameter of the plasma, such as electron temperature, ion density and the distribution of the electron energy. Therefore, diagnosing plasma discharge parameter is critical in the fundamental study of plasma and the improvement of plasma technology.But we are lack of the diagnosing part in most plasma application areas at present. Among those plasma diagnoses technologies, the probe technology has the advantages of simple configuration, being easy to operate and getting the all-sided parameter. Plus there is no commercial Langmuir probe at home, so it's really meaningful to develop the Langmuir probe diagnostics system. This thesis employs the probe diagnostics technology and improves the automation level of the system with the help of computer and SCM integration technology.The contents this thesis included as below:1. On the base of the knowledge of Microwave ECR plasma and probe diagnostics technology, this thesis designs a newly Langmuir probe and solves the problems of the microwave leaking and vacuum seal.2. This thesis designs a saw-tooth power supply with the output frequency adjustable and achieves the requirements of fast sweep.3. This thesis designs test circuit of probe current and voltage and works the serial communication between PC and SCM out, and realizes the real-time sampling and display of the characteristic curve. 4. The User Interface based on Visual C++ 6.0 has good visualization and complete function.5. A diagnostics is done on the microwave ECR plasma CVD facility. We get the plasma parameter, then analyze the experiment results and give the improvement advices.