Design Of Capacitance Measuring Macro Sensor For Calculating Capacitor Main Electrode Accurate Positioning Installation

The advantages of Capacitive displacement sensor are follows: small size, simple structure, Unosculant measure, fast dynamic response, no hysteresis distortion, high resolution, environment adaptiveness and low price, ect. Now widely used in ultra-precision measurement of displacement fields such as the nanoscale precision manufacturing and measurement.The main target of this paper is that use the way of capacitive displacement sensor positioning to design a capacitive measuring macro sensor device, this device will be uesd to install and adjust the 4 main electrodes of the calculable capacitor.And make the uncertainty of the calculable capacitor low to 10-9 order of magnitude. Main contents are follows:In Chapter One, the background of Ultra- precision displacement measuring technology, capacitive displacement measuring technology and calculable capacitor. In Chapter Two, the summary of the main mechanical structure and parameters of calculable capacitor. And the way of installing and initial position adjusting the 4 main electrodes of the calculable capacitor.In Chapter Three, the design scheme and the fundamental principles of the capacitive measuring macro sensor device,which be used to install and precise positioning the 4 main electrodes of the calculable capacitor, the capacitive measuring macro sensors accurately.In Chapter Four, the the design scheme and the fundamental principles of the precision impedance measurement system, which be used to measure the capacitance value.In Chapter Five, from data fetching, recording and analyzing in the adjusting experimentation many times, the 4 main electrodes are installed and precised positioning successfully.