Distributed Capacitive Medium Phase Shifter Developed

In this dissertation, a new CPW-type ferro-electric thin film dielectric phase shifter with parallel capacitor was investigated, which has significantly potential application in T/R module of millimeter-wave powered phased array radar. Through analyzing the design theory of previously designed phase shifter and researching the machining technique of the device, we have improved the dielectric phase shifter. The factual cpw-type phase shifter is comprised of the high-impedance transmission line and periodically loaded parallel capacitors. Considering characteristic of the device, we make use of all sorts of hign-frequency electromagnetic emulator, for example ANSOFT HFSS9.0 and ADS, to study the rule which is the structure parameters how to affect the insert loss and phase shift of the device. Find the appropriate process technics of whole apparatus, and fabricate it and test it well. The result shows: 1. Find out some flaws of the phase shifter that has already been designed, and bring forward a few ways to improve it. 2. Simulate and validate the advanced phase shifter to study the rule that the structure parameter how to affect the capability of the whole device by HFSS and ADS. Optimize the design of the phase shifter . 3. We have studied the peel-back technique of the top electrode of the parallel capacitors. Found the appropriate process technics to produce the phase shifter with parallel capacitors. 4. Compare test results of the device and analyse the reason which produces the test results. Paying attention to some questions that may be introduced while testing.