Developed Mems-based Silicon Beam Resonator Gas Sensor

A resonant gas sensor with the structure of micro cantilever beam based on MEMS technology is studied in this paper and the work principle of sensor is introduced theoretically. The structure of micro cantilever beam, the photolithographic mask and the self-excited resonant circuit system with the closed loop is designed. Using the Intellisuit software, the mechanical characteristic of micro cantilever beam is simulated; the relationship between the inherent frequency and size of micro cantilever resonator is discussed. According to the actual technology condition and equipment, a feasible technology method is provided. The sensor is manufactured through experiments, the etch velocity of KOH anisotropic etch at low temperature is gained, and the corner undercutting is compensated effectively. Synchronously, the protection problem of Al electrode is solved. Furthermore, the Multisim software is utilized to simulate the resonant circuit system, and the circuit is debugged practically. It is proved that the technology method is feasible to manufacture the resonant gas sensor with the structure of micro cantilever beam by using the MEMS technology. The integration and bulk production can be realized with the method that is applied to the field of micro gas sensor especially.