Microwave Plasma Electrostatic Probe System Design

Recently, the microwave plasma technique has attracted more and more attentions of the researchers. It has more excellent merits among all plasmas, for example it has high degree of ionization, high electron density, wide pressure scope and no electrode pollution. So the microwave plasma technology is widely used in CVD (Chemical Vapor Deposition), etching technology, ionization source and other fields. The level of application effect is directly related to the parameters in the plasma, such as density, energy allocation and average of the electrons and anions. Besides, people will improve the microwave plasma facilities and confirm the perfect working conditions according to experimental results. Therefore, diagnosing plasma discharge parameter is critical in the fundamental study of plasma and the improvement of plasma technology.Because of the special performance of microwave plasma, the study of diagnosis drops behind other studies. In this paper, we designed a newly Langmuir probe on base of analyzing the microwave plasma properties and all kinds of diagnostic methods, and designed a probe automatic measurement system by making use of automation technology, computer technology and integrated SCM and got some preferably results.The following work is completed.1. Designed a newly Langmuir probe, solved the problem of the wave leaking out and vacuum seal, besides, analyzed some troubles in its performance and gave the solving methods.2. Designed a scanning voltage and a signal detection circuit with the ADuC845 and other devices, and wrote related program.3. Wrote computer program using Delphi7.0.4. Used the measurement system on the plasma CVD system, got and analyzed some results, and gave improvement suggestions.