Micro-array Of High-g Acceleration Sensor Systems Electrical Interconnect

With the development of penetration weapons systems, the sensor has its new development requirements as the inertial fuse part. These requirements include micromation, high impact resistance, better heat dissipation, high reliability, low cost, etc., and the high impact resistance character is of critical important in penetration weapon system especially. Today, traditional techniques are very difficult to meet these requirements, but the booming micro-electromechanical systems (MEMS) technology and electrical interconnect technology meet these requirements well, and jointly promote the development of military technology.This thesis is base on military pre-research project from People's Liberation Army General Equipment Department, which focused mainly on electrical interconnection studies of micro-array acceleration sensor system which belong to lead-edge technology currently and its key research objects are interconnection package and mechanical reinforcement of micro-array acceleration sensor system. One of the key technical specification to fulfill in this research program is to achieve healthy function of the seal lead wire electricity interconnection under 1.5×105g acceleration impaction. The research content in this thesis includes the following four parts:1. Qualitative analysis of those factors which affect the micro-acceleration instrument system's electrical interconnection , such as blasting wire, the chip layout, the seal outer covering, the seal material, the lead attachment intensity and so on.2. Acceleration sensor on the impact of lead welding the main factors such as temperature, pressure, etc. are analysised. Carries on the intensity destruction pulling test to the seal lead wire, carries on the contrastive analysis using the tentative data and the estimated data, to affected the sensor system's electrical interconnection performance factor to make the improvement.3. In order to obtain the best seal strength, this thesis uses the fitting formula which calculates from the test date of manufacture processing. And this thesis carries on the fuzzy optimization to the data according to the fuzzy mathematics theory, which obtains the final optimized data, and base on this data, the author establishes the machinery reinforce expert database.4. To do failure test in ENDEVCO2270 impact calibration device. The test gives out the impact resistance limits of micro-array acceleration sensor, and by analysis of the curve on the test data, we can do research on those factors which influence test such as the shell, materials and fixtures. Afterward, we would make a bath of sensors of improved packagement.