Diffraction Of Electromagnetic Waves In The Periodic Structure Materials Field Simulation Algorithm

With the development of microelectronics technology, including large-scale integrated circuits, photonic crystal materials and devices. The critical dimension of these structures has been in the size of nanotechnology. With highly integrated, almost all kinds of microelectronic semiconductor chip are in the periodic structures, and the technique for measuring the critical dimensions and refractive index of them has shown particularly important. In this thesis, a detailed presentation of the technique for the measurement of periodic structures and the importance of the spectrum diffraction theory are made.This thesis describes a detailed derivation of several algorithms for the simulation of reflectance/tramittance on the periodic structure, includingthe scalar diffraction theory, the rigorous coupled-mode theory and Waterman method, which is taken as the main method in the most of this thesis. With the rigorous theoretical derivation and discussing in theory and comparison of corresponding simulation results, the restrictive conditions of the Waterman algorithm are summarized. And the improved algorithm with adaptive regularization and reduction the truncation error is presented.This thesis points that Waterman method as an auxiliary algorithm when RCWA is used as the general method. Waterman method could get accurate result in some cases that RCWA couldn't get the result accuratly and quickly. The improved Waterman method can be used to simulate the electromagnetic wave in some more complicated periodic structure.Finally, the software of this method with VC++ and MATLAB codes are developed according to the corresponding derived formulations. Based on some testing results, we come to the conclusion that all the functions are achieved, proves the reliability of the platform.