Design Of Acoustic Levitation Polishing Device And Study Of Abrasive Flow

Nanomechanical properties is one of the important parameters to study of nanophasematerials, components and structure. It has been become an important content ofnanotechnology. With the development of microelectronics, information, intelligent systemgradually to miniaturization, the wide application of nano-device and thorough research ofnanosecond science and technology, they are need to nanomechanics to provide theory basisof reliability design. Therefore, prepare a nanomechanics model of high quality and nocontamination has been a difficult problem need to solveFor the purpose of prepare a nanomechanics model of high quality, this paper adopt anew polishing method based on acoustic levitation. The surface roughness is 0.287nm afteracoustic levitation polishing, and no contamination in the surface. It has a high-qualitysample preparation than traditional polishing method.The main research content of this article as follows:1. According to the theoretical analysis, this article design a set of acoustic levitationpolishing experimental platform, including the occurrence of ultrasound systems, containerfor suspension polishing and frame structure. At the same time, choose the type of ultrasonictransducer and the structure. According to the ultrasonic frequency and wavelength, designthe ultrasonic horn. Through ANSYS model analysis to verify the feasibility of horn.2. According to the development of acoustic levitation polishing device, to study theabrasive flow field in the container. this article research the erosion energy of the abrasiveparticle to the surface, and establish a theoretical model. At the same time to study theperformance of slurry.3. By different polishing method for sample preparation, and comparing differentmethods of sample preparation processing effects. Through SEM, TEM and other tests toobserve the surface morphology on the specimen, to verity the effectiveness of acoustic levitation polishing.