Fabrication Of Black Silicon By Femtosecond Laser For Solar Cells And Characteristic Analysis Of Black Silicon

The evolution of black silicon fabrication has been summarized. Black silicon has been successfully fabricated by using femtosecond laser assisted with several kinds of gases in our laboratory. Scanning electron microscope image of the black silicon surface shows as spike structures. Dependence of micro-nano structure on experimental parameters such as pulse number, gas and gas pressure have been investigated. In addition, we also succeed in fabricating black silicon with third harmonic (355 nm wavelength) of ns YAG laser and experimental parameters have been partly optimized. Finally, the paper analyzes the absorption of the micro-nanostructure prepared by laser source above two conditions and the application prospect on the black silicon solar cells.