Design, Modeling And Fabrication Of Micropump Actuated By Laser-induced Shock Wave

As the power source of Micro Fluid system, key component of Micro Fluid system, people promote a lot of research of micropump, achieve many applications. Aiming at the deficiency which traditional micropump structures are complex, and difficult to fabricate, a novel actuating approach was proposed by this thesis basing on mechanical effect of Laser-induced shock waves, micropump designed by this approach have the characteri- stics of simple structure, easy to manufacture, low cost, to the benefit of miniaturization and integration with MEMS system.By the investigation of the theory of Laser-induced shock waves, concluded that laser-induced shock waves can actuate the micropump. After study the micropump design of abroad and home, this thesis designed a planar valveless micropump suited for laser actuated. Analyze the performance of diffuser/nozzle-key component of valveless micropump by CFX, obtain the flow pattern of diffuser/nozzle, based on this result designed a valveless micropump suite for this thesis.The model of surface pressure produced by laser induced shock waves was investigated. The valve-less micropump's coupling modal was calculated. The feasibility of this actuated approach was validated. The influence of laser parameter (frequency, duty cycle, intensity, spot diameter) on flow rate was analyzed by the fluid-structure interaction simulation and the stability of flow rate was also been investigated. The result reveals that laser intensity and spot diameter are the main influencing factors on the flow rate, flow rate maximizing when duty cycle at 0.6, the difference of flow rate at each single pulse less than 5% at steady operation.using the regression analysis to get the optimal parameters of laser,obtained the maximum flow rate of micropump. Manufacture the prototype micropump by mems technology.