A 2D Coplanar Translation Stage With Synchronous Xy Position Metrology For Surface Scanning Measurement

Precision 2D translation stage is an important component of 3D surface measuring instruments. It is of great significance to develop a 2D translation stage with high precision, high movement flatness, and stable translation movement. Therefore, a synchronous XY position metrology technology is studied and a 2D coplanar translation stage is developed based on it.Firstly, the structure 2D coplanar translation stage is proposed based on a special mechanical structure. Therefore, the 2 oriented planes of the translation stage are on the same plane to realize the 2D coplanar through it, this can improve the flatness of the 2D translation stage effectively. Finite element analysis (FEA) software ANSYS is used to analyze the deformation and stress of the key parts. The selection and parameter design of the key parts is stated.Secondly, the synchronous XY position metrology is realized based on double cross diffraction grating principle. The double cross diffraction grating principle is studied and used to realize the synchronous XY position metrology. The mechanical supporting structure is devised and the circuit treatment scheme of stripe signals is presented to realize the function of 2D displacement metrology.PC parallel ports are adopted to achieve stage driving control, and the user interface is designed based on VC 6.0.Finally, theoretical and experimental analysis on the accuracy and error sources of the stage has been carried out.The self-developed 2D coplanar translation stage ensures high translation flatness effectively, and the synchronous XY position metrology system improves 2D position accuracy. The stage is of low cost, simple and compact structure.