Research On Electromagnetic Levitation Micromotor With Stator Embedded

Electromagnetic levitation micro motor with stator embedded (ELMSE), which is constituted by a double-sided stator and a hollow annular rotor, is the core component of electromagnetic levitation micro gyroscope with stator embedded, and it is a new kind of electromagnetic levitation micro motor. The hollow annular rotor is suspended and driven by electromagnetic force. ELMSE owns the same principle of induction motor. So the ELMSE not only can eliminate the problems such as frequency mismatch and cross-axis orthogonal coupling that intrinsically exist in the MEMS vibratory gyroscope, but also be able to achieve potential high accuracy (inertial navigational grade). The key superiorities such as of high accuracy, high integration and low cost provide unique research potential and application perspective, especially for the aeronautic and astronautic situations that have strict volume and performance requirements.This dissertation aims at designing the structure of ELMSE and building the suspending circuit and rotating circuit. the simulation on levitation,lateral stability and rotation characteristics is analyzed here, a signal source is set up to provide multi-way signals which levitation circuit and rotation circuit need, the double sided stator and the hollow annular rotor are fabricated with micro fabrication technology. All of above laid the foundation for electromagnetic levitation micro gyroscope with stator embedded. On the whole, this dissertation provides substantial technical basis for further research, and its main research achievements are briefly introduced as follows:The structure of ELMSE is introduced at first, and the modeling and simulation analysis are taken by ANSYS and Infolytica. Appropriate currents parameters can be get from the analysis. Then a signal source is set up to provide multi-way signals which are get from analysis. One way 10MHz sine signal is output to drive the levitation circuit and two way 2MHz signals with 90 degrees phase difference are output to drive the rotation circuit. Then the levitation circuit and rotation circuit are set up based on the signal source.At last the stator and rotor are fabricated, layer buried technology, double-sided aligning and polyimide graphical process are introduced to improve the micro fabrication process of stator. The hollow annular rotor is also fabricated by micro fabrication technology.The innovations of this research on ELMSE are presented below:(1) The embedded structure can improve levitation stability, lateral stability and rotation speed;(2) The simulation analysis which is analyzed by a new tool Infolytica can improve rotor speed further more; (3) The multi-coil separation, layer buried technology and polyimide layer are used in the fabrication process of double-sided stator; (4) A new signal source is designed for the levitation circuit and rotation circuit, the frequency and phase difference of signals are controlled by software without hardware changing.